Abstract
Electrons diffracted from the surfaces of crystals have recently been used very effectively for the imaging of the structure of the surfaces in both TEM and STEM instruments. With an ultra-high vacuum TEM instrument the group at Tokyo Institute of Technology have demonstrated the value of the technique for imaging monatomic surface steps, dislocations and surface superlattices on silicon. With a STEM instrument it is possible to combine imaging with a lateral resolution of 10A or better, and microdiffraction and microanalysis of small areas of the surface. In this paper we report further STEM observations illustrating some characteristics of these modes of surface study.Figure 1 shows two views, with different magnification, of the surface of a bulk MgO crystal, having dimensions 0.5 to 1mm, formed by cleaving a larger crystal. In order to mount such crystals with a minimum of handling and without adhesives which might introduce impurities they were enclosed in precleaned folding grids for mounting in the high resolution goniometer cartridge. The images were obtained using the (600) reflection with the beam close to the [010] direction.
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Schedule a callMore From: Proceedings, annual meeting, Electron Microscopy Society of America
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