Abstract
Image blurring of MeV transmission electrons for gold nanoparticles on the top surface of micrometer-thick specimens has been investigated using the Monte Carlo simulation. Both the simulated line density profile and therefore image blurring were in good agreement with the experimental ones in the ultrahigh voltage electron microscope. Quantitative effects of specimen thickness and electron energy on image blurring were presented, in which the specimen thickness had a greater influence. Image blurring was demonstrated to be caused mainly by multiple elastic scattering, but it could be reduced to several nanometers for a 5µm thick epoxy-resin specimen at the electron energy of 2MeV.
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