Abstract
Recently developed methods [ J. Opt. Soc. Am. A11, 3292– 3307 ( 1994)] permit definitive studies of two-mirror systems for a variety of applications. As an illustration of such a study, unobstructed, telecentric, plane-symmetric systems of two conic mirrors that are intended for distortion-free projection are investigated here. The magnification, speed, and field size in the examples are arbitrarily chosen to correspond to values that are appropriate for full-field soft-x-ray projection lithography. Low-order imaging constraints are applied to eliminate most of the 13 parameters that specify the configuration of such a system. It is shown that there are just two three-parameter families of systems and a single four-parameter family. The associated three-and four-dimensional merit function spaces are mapped, and selected systems from various regions of the spaces are discussed.
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