Abstract
Inelastic electron tunneling spectroscopy (IETS) has been used to detect the vibrational modes of molecules and has been proposed as the mechanism of olfaction according to the so-called Vibration Theory. Motivated by the promise of an electronic nose that will be biomimetic - in the sense of the Vibration Theory - we demonstrate here IET spectroscopy of vibrational modes in metal-insulator-semiconductor (MIS) devices consisting of ultrathin Hf0 2 deposited on silicon by Atomic Layer Deposition (ALD). Low-noise IETS measurements at 10K are carried out using second harmonic detection by a standard lock-in procedure. Parallely, a filtering algorithm is applied to the measured I-V data to compute its second derivative. The IETS peaks in the filtered data and experimentally measured lock-in data are compared and are found to be in agreement with each other; as well as with other experimental vibrational energy data measured through IETS or other techniques.
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