Abstract
The effect of vacancies, tetrahedral interstitials and hydrogen impurities on the local partial densities of states of carbon atoms has been studied by means of LMTO-ASA supercell calculations. Based on a comparison of calculation results with experimental X-ray CK α emission spectra of diamond-like films obtained by different techniques, the possible dominating role of interstitial carbon atoms or vacancies is emphasized for diamond-like films obtained by one or another technique.
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