Identification of N–H related acceptor defects in GaAsN grown by chemical beam epitaxy using hydrogen isotopes

Abstract

The N–H related acceptor defects in GaAsN grown by chemical beam epitaxy (CBE) are studied by hydrogen isotopes, H and D. When the films are grown by a conventional arsenic source, deep level transient spectroscopy (DLTS) reveals two energy levels at 0.11 and 0.19 eV above the valence band. These levels were considered to act as a double acceptor in the literature. When the films are grown by a deuterated arsenic source, new signals appear in DLTS spectra at 0.15 and 0.23 eV. This indicates that the new signals are originated from D-related defects. The energy differences between 0.15 and 0.11 eV, and that between 0.23 and 0.19 eV are same (0.04 eV). Although these energy levels become deeper with increasing the growth temperature, the energy differences are almost constant independent of the growth condition. In addition, the intensity ratios of the peaks at 0.15 (0.23) eV to that at 0.11 (0.19) eV have a good correlation with the isotopic concentration ratio of D to H in the grown films. Therefore, we conclude that the energy differences and intensity ratios of the DLTS peaks occur due to the structural change from N–H to N−D in the same type of defect, and that this acceptor is an N–H related defect.