Abstract
Tetramethyltin was decomposed in an ion source and the fragment ions produced were identified using a low-energy mass-selected ion beam machine. Dominant fragment ions were found to be H+, CH2+, and Sn+. Subsequently, fragment ions were mass-selected. The mass spectrum of the selected ions indicated that only a single peak appeared at the mass number of 120 u, being suggestive of the presence of 120Sn+ ions. The ion energy was set at the range of 20–100 eV. The Sn+ ion beam was irradiated to a Si substrate, and a film was then found deposited on the substrate after the ion beam irradiation. An X-ray diffraction measurement showed that the film obtained was metallic Sn. Then, the Sn+ ion beam was irradiated to a quartz crystal microbalance substrate. We found that most of the irradiated Sn+ ions were adhered to the substrate, at the ion energy levels of 25 and 58 eV, producing the Sn film, whereas a 107 eV Sn+ beam caused a significant proportion of Sn atoms in the film to detach from the substrate, probably due to sputtering.
Highlights
Low-energy ion beam technique is recognized to be of use for various film-type material formations
Identification of fragment ions produced from tetramethyltin and the production of low-energy Sn+ ion beam
Fragment ions produced from TMT in a Freeman-type ion source were firstly identified
Summary
Low-energy ion beam technique is recognized to be of use for various film-type material formations (e.g., iron [1], carbon [2], silicon carbide [3], and silicon dioxide [4]). The formation of films containing tin (Sn) atoms draw much attention because Sn-containing films (e.g.; tin oxide) are useful for many actual applications such as gas sensors [5], solar cells [6], and touch screens [7]. Those Sn-containing films can be fabricated by many experimental techniques such as chemical vapor deposition (CVD) [8], plasma-enhanced CVD [9], evaporation [10,11], sol-gel technique [12], and spray pyrolysis [13,14]. Fragmentation [19,29], pyrolysis [30], thermolysis [31], and plasmolysis [32] of TMT have been investigated
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