Abstract
Dynamic interaction seriously limits the overall performance of a Dual-Stage Actuator (DSA) system. This paper aims to identify and compensate for the dynamic interaction in a non-contact DSA system. The effects of the interaction in the non-contact DSA system are initially classified as non-contact position-dependent disturbance forces (PDDFs) and velocity-dependent disturbance forces (VDDFs). The PDDFs in the three degrees of freedom (DoFs) motion space between the two stages of the DSA system are directly identified in the time domain, and VDDFs are indirectly identified in the form of damping values in frequency domains. The feedforward networks of the force are subsequently applied to compensate the PDDFs and VDDFs, which are indexed with relative displacement and velocity, respectively. Experiments are finally conducted to investigate the effectiveness of compensation, which infers that the final positioning error in the time domain can be reduced from 260 nm to 130 nm with PDDFs and VDDFs compensation. The gain of the interaction transfer is decreased in the frequency range of up to 45 Hz with PDDFs and VDDFs compensation. With this method, some weak dynamic interaction can be completely compensated for by the force feedforward compensation, and the positioning accuracy of non-contact DSA systems can be greatly improved.
Highlights
A Dual-Stage Actuator (DSA) system generally exists in the types of measuring equipment that simultaneously require both a long stroke and high precision
The permanent magnets of SS Voice Coil Motor (VCM) and Magnetic Gravity Compensators (MGCs) with thewith ferromagnetic materials, and withand non-ferromagnetic yet electrically conductive materials, interact the ferromagnetic materials, with non-ferromagnetic yet electrically conductive of the LS actuator stage, which results in position-dependent disturbance forces (PDDFs)
velocity-dependent disturbance forces (VDDFs) are indirectly identified in theposition, form ofasdamping forcePDDFs, feedforward filled with the obtained distribution is applied to indexedtable with the relative shown in values
Summary
A Dual-Stage Actuator (DSA) system generally exists in the types of measuring equipment that simultaneously require both a long stroke and high precision. In Reference [27], only the reaction force as force interaction is compensated for to prevent collisions In these DSA systems, no other weak interactions were further analyzed, since they might not exist in their certain structures or may not critically influence their required performance. The effectiveness of such compensation is evaluated experimentally With this method, the influence of the weak dynamic interaction between the LS and the SS actuator stages can be compensated for Sensors 2019, 19, x FOR PEER REVIEW by the force feedforward compensation without increasing the hardware cost of the system, and the positioning accuracy of non-contact DSA systems can be greatly improved
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