Abstract
We have fabricated GaAs Schottky contacts with ideal diode characteristics by in situ photoelectrochemical etching of n-GaAs in electrolytic solutions containing metal ions just prior to electrodeposition (electroplating) of metal overlayers. Even by in situ etching, if not carried out properly, a minute residual oxide layer as thin as 1 nm would degrade the ideality factor (n value) of diodes. We here report that by using photocurrent transient measurements, it is possible to find the proper etching conditions that provide a surface free of residual oxide layers. By analyzing the Schottky barrier heights for the ideal diodes fabricated with four kinds of metals (Sn, Pb, Ni, Au), we have concluded that the value of the index of interface behavior S was around 0.1. © 1999 Scripta Technica, Electron Comm Jpn Pt 2, 82(5): 13–20, 1999
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
More From: Electronics and Communications in Japan (Part II: Electronics)
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.