Abstract
Three different chemical ratios of PtxCo1−x thin films were grown on p‐type native oxide Si (100) by Magneto Sputtering System with cosputtering technique at 350°C temperature to investigate electrical prosperities. X‐ray photoelectron spectroscopy analysis technique was used to specify chemical ratios of these films. The current‐voltage (I-V) measurements of metal‐semiconductor (MS) Schottky diodes were carried out at room temperature. From the I-V analysis of the samples, ideality factor (n), barrier height (ϕ), and contact resistance values were determined by using thermionic emission (TE) theory. Some important parameters such as barrier height, ideality factor, and serial resistance were calculated from the I-V characteristics based on thermionic emission mechanism. The ideality factors of the samples were not much greater than unity, and the serial resistances of the samples were also very low.
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