I n s i t u growth of YBa2Cu3Ox thin films by reactive cosputtering

Abstract

We have synthesized superconducting YBa2Cu3Ox thin films in situ using magnetron cosputtering with three metallic targets (Y, Ba, Cu). We present details of the sputtering chamber, as well as the growth conditions necessary to obtain superconducting films. We discuss the effects of oxygen and ozone partial pressure, differential pumping, O2–Ar plasma deposition and Ba–Cu alloy targets. We elaborate on our ozone condensing and delivery system. Finally, we describe the difficulties encountered with the deposition system and provide details of possible improvements.