Abstract

Fast steering mirrors (FSMs), driven by piezoelectric ceramics, are usually used as actuators for high-precision beam control. A FSM generally contains four ceramics that are distributed in a crisscross pattern. The cooperative movement of the two ceramics along one radial direction generates the deflection of the FSM in the same orientation. Unlike the hysteresis nonlinearity of a single piezoelectric ceramic, which is symmetric or asymmetric, the FSM exhibits complex hysteresis characteristics. In this paper, a systematic way of modeling the hysteresis nonlinearity of FSMs is proposed using a Madelung’s rules based symmetric hysteresis operator with a cascaded neural network. The hysteresis operator provides a basic hysteresis motion for the FSM. The neural network modifies the basic hysteresis motion to accurately describe the hysteresis nonlinearity of FSMs. The wiping-out and congruency properties of the proposed method are also analyzed. Moreover, the inverse hysteresis model is constructed to reduce the hysteresis nonlinearity of FSMs. The effectiveness of the presented model is validated by experimental results.

Highlights

  • Based on the advantages of fast response, high stiffness, and high electromechanical coupling efficiency, fast steering mirrors (FSMs), driven by piezoelectric ceramics, are widely used as actuators in the field of beam control [1,2,3,4]

  • In the presented hysteresis operator, we provide a concrete realization algorithm that can be directly used in practice

  • The actual output angle and predictive angle of our model are depicted in Figure 13b, and error signal is shown in Figure 13c, where the normalized maximum error (NME) e N is eN =

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Summary

Introduction

Based on the advantages of fast response, high stiffness, and high electromechanical coupling efficiency, fast steering mirrors (FSMs), driven by piezoelectric ceramics, are widely used as actuators in the field of beam control [1,2,3,4]. In a FSM, four piezoelectric ceramics are symmetrically distributed in a crisscross pattern. The mirror platform is connected to the housing by flexure hinges. These four piezoelectric ceramics cooperate to push the mirror platform to deflect. The motion of each two ceramics along one radial direction generates the deflection of the FSM in the same orientation. The opposing two piezoelectric ceramics in one direction are connected in series to share a fixed voltage of 100 V. The control voltage is injected into to the electrical junction of these two ceramics. The ceramics are elongated or shortened according to the change of the control voltage. The mirror platform is deflected by the motions of the ceramics

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