Hysteresis in the E- to H-mode transition in a planar coil, inductively coupled rf argon discharge

Abstract

Inductively coupled rf discharges typically exhibit two modes of operation, namely, a low-density mode known as the E mode and a higher density mode known as the H mode. The transition between these modes exhibits hysteresis. Experimental observations of these transitions are presented. By means of a mixture of electromagnetic theory and circuit analysis and by invoking the requirement that the power absorbed and lost by the electrons should balance, the possible working points of an inductively coupled rf plasma source are identified in (P, ) space, where P is the power absorbed by the electrons, is the peak rf current in the induction coil and is the electron number density. Once the loci of the operating points have been identified in this manner, it is possible to construct a consistent explanation for all the experimental observations reported in the first part of the paper. In particular, it is possible to present an explanation for the hysteresis-like behaviour manifested by the mode transitions. Basically, the transitions occur when it is no longer possible to balance the power absorbed and lost by electrons.