Abstract
Abstract The purpose of this work is to clarify the relationship between some of the properties of MOS (metal, oxide, silicon) capacitors passivated by Ba(PO3)2-Al(PO3)3-B2O3 glasses and the hydroxyl contents of the glasses. When substitution of Al(PO3)3 for Ba(PO3)2 progressively decreased the OH− absorption intensity, the C-V (capacitance-voltage) curve shift, ΔVG in the MOS capacitors decreased.
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