Abstract

We fabricated single-layer porous silicon (PSi) on a p +-type silicon wafer and investigated its reflectance spectrum on exposure to different concentrations of various organic vapors. When the PSi sample was exposed to methanol, acetone, ethanol, and isopropanol vapors, the reflectance spectrum promptly shifted toward longer wavelengths by about 1.5, 4.5, 7.0, and 9.0 nm, respectively. The PSi sample showed excellent sensing ability under different concentrations and types of organic vapors. In addition, a slight hysteresis of the red-shift was observed during repeated exposure to an organic vapor at different concentrations. After the organic vapors had been removed, the reflectance spectrum promptly returned to its original state.

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