Hyperthermal hydrogen induced cross-linking and fabrication of nano-wrinkle patterns in ultrathin polymer films

Abstract

This paper presents an efficient and simple processing method for the fabrication and regulation of nano-scale wrinkle patterns. The stiff film is created through cross-linking the surface of ultrathin polymer film within twenty nanometers by using the hyperthermal hydrogen induced cross-linking (HHIC) method, and then the bilayer is heated above the glass transition temperature of the polymer before quenched to room temperature. In this way, wrinkle patterns with wavelength ranging from 150 to 300nm are prepared. And a morphology transition between the pattern of single points (convex bumps) and the pattern of ridges (labyrinth) is observed. The formation of wrinkle patterns is systematically investigated as functions of the thickness of original ultrathin film, the time of HHIC treatment, the annealing temperature and the chemical structure of polymers. Furthermore, nano-patterned silicon wafer is used as a template to create multiscale, anisotropic wrinkle patterns.