Abstract

The subwavelength mode volumes of plasmonic filters are well matched to the small size of state-of-the-art active pixels in CMOS image sensor arrays used in portable electronic devices. Typical plasmonic filters exhibit broad (> 100 nm) transmission bandwidths suitable for RBG or CMYK color filtering. Dramatically reducing the peak width of filter transmission spectra would allow for the realization of CMOS image sensors with multi- and hyperspectral imaging capabilities. We find that the design of 5 layer metal-insulator-metal-insulator-metal structures gives rise to multi-mode interference phenomena that suppress spurious transmission features and give rise to single transmission bands as narrow as 17 nm. The transmission peaks of these multilayer slot-mode plasmonic filters (MSPFs) can be systematically varied throughout the visible and near infrared spectrum, leading to a filter that is CMOS integrable, since the same basic MSPF structure can operate over a large range of wavelengths. We find that MSPF filter designs that can achieve a bandwidth less than 30 nm across the visible and demonstrate experimental prototypes with a FWHM of 70 nm, and we describe how experimental structure can be made to approach the limits suggested by the model.

Highlights

  • Today’s state-of-the-art mobile electronics are as powerful as larger computers [1], and are equipped with a variety of sensors including accelerometers, gyroscopes, CMOS image sensors, and magnetometers [2]

  • We find that the design of 5 layer metalinsulator-metal-insulator-metal structures gives rise to multi-mode interference phenomena that suppress spurious transmission features and give rise to single transmission bands as narrow as 17 nm

  • We find that MSPF filter designs that can achieve a bandwidth less than 30 nm across the visible and demonstrate experimental prototypes with a FWHM of 70 nm, and we describe how experimental structure can be made to approach the limits suggested by the model

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Summary

Introduction

Today’s state-of-the-art mobile electronics are as powerful as larger computers [1], and are equipped with a variety of sensors including accelerometers, gyroscopes, CMOS image sensors, and magnetometers [2]. In the case that the metallic layer is thick enough to be substantially opaque to incident photons, the SPP mediated process is the dominant mode of transmission and the surface acts as a band-pass color transmission filter Such aperture arrays have been the topic of substantial scientific interest due to these remarkable optical properties and their utility as a testbed for studying fundamental light-matter interactions in plasmonic systems [7,21]. The multilayer slot-mode plasmonic filter (MSPF) investigated demonstrates a narrow transmission bandwidth and spurious peak suppression, as shown, and by changing the periodicity of the slits, this filter can be swept across the entire visible spectrum. The transmission spectrum of an optimized Al/SiO2 MSPF possesses a FWHM of 34 nm and peak transmission of just over 20%

Experimental verification
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