Abstract
We are developing actuators and sensors using PZT thin film deposited with hydrothermal method. The merit of the hydrothermal method is thick film and applicable to complicated surface shape. A micro ultrasonic motor has been fabricated. The diameter and length of the stator transducer of the motor were 1.4 mm and 5 mm. The maximum output torque and no-load revolution speed were 0.67 μNm and 680 rpm. A touch probe sensor for measuring surface roughness has been fabricated. The sensor thickness and length were 0.12 mm and 9.8 mm. The resonance frequency and Q factor were 304 kHz and 705. The resolution of the sensor was estimated to 2.4 nm.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
