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Abstract
The hydrogenation properties of Zr samples with and without an Ni overlayerunder various plasma conditions were investigated by means of non-Rutherfordbackscattering and elastic recoil detection analysis. Thetheoretical maximum hydrogen capacity, 66.7 at%, could be achieved at ahydrogen absolute pressure of ~2 Pa and a substrate temperature of~393 K for a plasma irradiation of only 10 min; this wassignificantly greater than that for gas hydrogenation under the samehydrogen pressure and substrate temperature. It was also found that the Cand O contamination on the sample surface strongly influences the hydrogenation,and that the maximum equilibrium hydrogen content drops dramatically withthe increasing total contamination. In addition, the influence of the Nioverlayer on the plasma hydrogenation is discussed.
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