Abstract
The optical, and electrophysical characteristics of hydrogenated silicon oxycarbonitride films synthesized by the plasma enhanced chemical vapor decomposition of the mixtures of 1,1,1,3,3,3-hexamethyldisilazane with oxygen and nitrogen in the temperature range of 373–973 K have been studied. It has been shown that the obtained films are highly transparent (transmittance is ∼92–99%) in the UV, visible, and IR ranges of the spectrum; they have refractive indices in the range of 1.43–2.25, a low reflection coefficient of visible light (nearly 3%), and low dielectric permittivity.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
