Abstract
Hydrogenated amorphous silicon a-Si:Hx∕a-Si:Hy compositional superlattices are produced by periodic switching two pulse-wave modulation plasmas. Simply varying the on and off times of pulse waves selectively controls the Si–H bonding configurations and yields a-Si:Hx∕a-Si:Hy superlattices with spatial periodic change of the designed monohydride (SiH) bonds and polyhydride (SiH2)n bonds over ultrathin periods (4.5–2.5nm) with lattice-constant sublayer thicknesses (2.5–0.75nm). The superlattice structures are identified by the observation of x-ray Bragg’s diffraction peaks. The bandgap and refractive index are controlled by the spatial distribution of different Si–H bonds and changing sublayer thickness in superlattice structure.
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