Hydrogenated amorphous carbon films with different nanostructure: A comparative study

Abstract

The introduction of curved graphite fragments into hydrogenated amorphous carbon films has been studied, and their contents are always estimated by TEM and Raman. Here, we detailedly discussed the advantage and disadvantage of TEM and Raman fit method. Combined with FTIR results, we claified the chemical structures of the structural films and the bonded sites of doped H. The curved graphite structures included hexahydric carbon rings, and amorphous carbon (a-C) structures had rich olefinic groups and H. Finally, the differences among TEM, Raman, FTIR and H analysis in terms of the contents of curved graphite fragments were discussed.