Abstract

Over the past decade, the medical role of hydrogen sulfide (H2S) for therapeutic applications and diagnostics was extensively investigated and revealed the importance of H2S for medical breath analysis.It was suggested that decreased production of the endogenous gaseous mediator H2S in tissues of the human respiratory system can be interpreted as an early detection biomarker for inflammatory diseases like asthma etc. In order to detect the H2S concentration levels of interest, a reliable selective device sensitive to H2S in the very low parts per billion (ppb) range is needed.The main goal of our project is the development of such a highly sensitive, reproducible and reliable H2S gas sensor, acting as a future integrated component of a multiple-sensor array in an “electronic nose” type device for medical applications or for detecting trace concentrations in chemical industry.We present here a planar resistive gas sensor design based on the gas sensing mechanism of a chemical field effect transistor (ChemFET) made from very high quality zinc oxide (ZnO) nanowires (NW) with gas sensitive open gate. The open gate operates as a transducer between adsorption/desorption of the ambient target gas and a measurable resistivity change in the NWs. This resistivity change results from the band bending effect of metal oxide surface exposed to different gas atmospheres and is analyzed by current-time (I-t) measurements.To improve the selectivity of our ZnO NW sensor towards a certain target gas, we investigated the impact of surface modification by addition of catalytic metal layers on the detection limit of our ZnO NWs towards H2S. In particular, we studied the chemical affinity between gold (Au) and sulfur (S) which leads to catalytic effects between the sputtered gold nanoparticle layer and the target gas H2S. Accordingly, H2S molecules are expected to adsorb more efficiently on Au modified ZnO NWs and drastically improve the overall sensor performance towards H2S. Our modified ChemFETs showed higher signal-to-noise ratio (SNR), improved sensitivity, faster response time, and an exceptionally low detection limit of less than 10 ppb for H2S diluted in synthetic air at room temperature.

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