Hydrogen plasma effect toward the AZO/CuCr/AZO transparent conductive electrode

Abstract

The influence of the Cr:Cu thickness toward the triple-layered transparent conductive film, AZO/Cr:Cu/AZO (ACCA), is presented in the study. The structural and electro-optical properties of the ACCA films are discussed. The thickness of the middle metals layer is varied and that of the AZO layers are constant. The sheet resistance of the ACCA film decreases obviously with the deposition time of Cr:Cu layer and is equal to 93.6Ω/□ at the 30s-deposited sample. The decrease of sheet resistance of the film becomes saturated as further increases the deposition time. The transmittance of the film is much dependent on the Cr:Cu thickness and a reasonable transmittance of 85% has also been obtained at the 30s-deposited sample of the ACCA film. The corresponding figure of merit (FOM) value is equal to 2.1×10−3Ω−1. There is no diffraction peaks related to Cr and Cu was observed through x-ray diffraction analysis, this indicates the Cr:Cu layer is amorphous structure. A notable ZnO (002) c-axis preferential growth is shown at each diffraction pattern and the crystallinity of this grain is dependent on the thickness of metal layer. H2 plasma passivation shows improvement on the electro-optical properties.