Abstract
Penning-type discharge plasma ion source is a kind of powerful discharge device applied widely in many fields. In this paper, optical emission spectroscopy (OES) measurement is carried out to diagnose the parameters of hydrogen plasma in a miniature penning-type discharge ion source. The relative intensity of neutral atomic hydrogen emission spectral lines is used to evaluate the electron temperature of hydrogen plasma. The experiment results indicate that the relative intensity of Balmer-α, Balmer-β and Balmer-γ lines exhibits significant dependence on the filling gas pressure and the electron temperature is about 1.5–3 eV in the range of discharge current 30–180 μA when the anode voltage is fixed at 1.4 kV.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
