Abstract
physica status solidi (a)Volume 145, Issue 2 p. K37-K42 Short Note Hydrogen Incorporation in Sputter-Deposited, In-Chamber Annealed Amorphous Silicon Thin Films. An Infrared and Elastic Recoil Analysis R. Rüther, R. Rüther Department of Electrical and Electronic Engineering, The University of Western Australia. Nedlands Search for more papers by this authorJ. Livingstone, J. Livingstone Department of Electrical and Electronic Engineering, The University of Western Australia. Nedlands Search for more papers by this authorN. Dytlewski, N. Dytlewski Lucas Heights Research Laboratories, Australian Nuclear Science and Technology Organisation, Lucas Heights Search for more papers by this authorD. Cohen, D. Cohen Lucas Heights Research Laboratories, Australian Nuclear Science and Technology Organisation, Lucas Heights Search for more papers by this author R. Rüther, R. Rüther Department of Electrical and Electronic Engineering, The University of Western Australia. Nedlands Search for more papers by this authorJ. Livingstone, J. Livingstone Department of Electrical and Electronic Engineering, The University of Western Australia. Nedlands Search for more papers by this authorN. Dytlewski, N. Dytlewski Lucas Heights Research Laboratories, Australian Nuclear Science and Technology Organisation, Lucas Heights Search for more papers by this authorD. Cohen, D. Cohen Lucas Heights Research Laboratories, Australian Nuclear Science and Technology Organisation, Lucas Heights Search for more papers by this author First published: 16 October 1994 https://doi.org/10.1002/pssa.2211450256Citations: 5 Nedlands, WA 6009, Australia. Lucas Heights, NSW 2234, Australia. AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinkedInRedditWechat Citing Literature Volume145, Issue216 October 1994Pages K37-K42 RelatedInformation
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