Abstract
Silicon fatigue lifetime was examined in four different environments. Fatigue failure occurs in the range of 103–105 cycles under the stress amplitude level of around 90% to the static fracture strength under monotonic loading, both in lab air with relative humidity (RH) 35–40% and hydrogen with RH 5%. In contrast, no specimen fractures with the same stress level up to more than 107 cycles in nitrogen and oxygen with RH 5%. These facts suggest that hydrogen, which could also be supplied from water adsorbed on the surface, had a significant impact on the fatigue damage accumulation in silicon.
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