Abstract
ABSTRACTWe report here the first phase of our attempt to deposit “device-quality” a-Si:H films by glow discharge near room temperature (50 °C). We have found that, at a low rf power density (40 mW/cm2) and high hydrogen/silane ratios (≥ 2), film quality is not uniquely determined by the substrate temperature, Ts. The microstructure of our low hydrogen content films as revealed by infrared (IR) and nuclear magnetic resonance (NMR) spectroscopies is similar to that of “device-quality” films deposited at standard Ts. The next phase of our work is to ascertain whether or not similar IR and NMR characteristics between our low Ts films and the standard Ts films imply also similar opto-electronic properties.
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