Abstract
We studied isothermal hydrogen desorption from a Si(111)1×1 surface at temperatures of ~711, 732, 752, and 771 K by observing sum frequency generation (SFG). Peak shift and width broadening of the Si‐H vibration occurred with increase of heating time. We also obtained SFG intensity images of monohydride species on the surface after heating for 10 s at temperatures of 592, 625, 666, 728, and 752 K. The SFG intensity images with a spatial resolution of 5 µm indicated that the hydrogen desorption was homogeneous. This result suggests that the hydrogen atoms diffused homogeneously on the Si(111)1×1 surface. Copyright © 2011 John Wiley & Sons, Ltd.
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