Hydrogen depth profiling with sub-nm resolution in high-resolution ERD

Abstract

A depth resolution of 0.28 nm is obtained in a depth profile of hydrogen in silicon using a newly developed high-resolution elastic recoil detection (ERD) system. The system consists of a standard 90° sector magnetic spectrometer (energy resolution ∼0.1%) for high-resolution measurement and an electrostatic deflector for blocking scattered incident ions without disturbing the energy resolution. The system is very simple as compared with other high-resolution ERD systems and the data acquisition time is reasonably short.