Abstract

Hydrogen depth profiles in thin films of sputtered Cu xZr 1-x amorphous alloys have been measured using the resonant nuclear reaction 1H ( 15N, αγ) 12C. In Cu 0.3Zr 0.7, Cu 0.4Zr 0.6 and Cu 0.5Zr 0.5 alloys the hydrogen bulk concentrations expressed bythe atomic ratio H/Zr are respectively 0.26, 0.45 and 0.80. Hydrogen mobility under beam impact is observed at both interfaces (air-film, film-substrate) and in the molybdenum substrate. Evolution of the hydrogen profiles has been followed as a function of annealing temperature. No departure of hydrogen is observed below 520K; at temperatures close to the crystallisation, the hydrogen content remains high, in the 20–30 at % range. These results are discussed in correlation with physical properties of the alloys.

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