Abstract

Characteristics of gas flow in the transition regime are presented for microchannels for both subsonic and supersonic flows. A low speed pressure driven flow and two high speed flow cases through microchannels have been documented using a hydrodynamic finite element formulation with first order slip/jump boundary conditions. The subsonic flow case uses a channel of aspect ratio 5639, while for the high speed flow the microchannel has an aspect ratio of 5. Presented subsonic flow results are benchmarked with experiment and reported numerical model. The solution profiles for supersonic micro flow cases are compared to the published DSMC results. Numerical solution of the hydrodynamic model documents excellent shock capturing capability.

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