Abstract
Silicon photonics represents an attractive platform for optical sensing of ultrasound owing to the high light confinement it can achieved, which can enable the development of detector with sub-micron sizes. However, the small elasto-optic coefficients of silicon and silica limit the sensitivity of conventional silicon-on-insulator (SOI) sensors, in which the silicon core is surrounded by a silica cladding. In this work, we demonstrate an order-of-magnitude increase in the response of a silicon-photonics waveguide to ultrasound by replacing the silica over-cladding with bisbenzocyclobutene (BCB) - a transparent polymer with a high elasto-optic coefficient.
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