Abstract
We report on a newly developed technology for the nanoscale processing of the conducting polyaniline (PANI) with an unprecedented areal patterning order and density control exceeding 0.25 teradot/inch2. A simple two-step process is put forward to hierarchically build a large variety of functional PANI nanostructures on virtually any type of flexible or rigid substrates. Using template confinement, through Pt catalyzed electroless growth, highly-ordered arrays of distinct PANI nanowires are produced. Complex three-dimensional (3D) structural control is achieved through a direct pattern transfer using a novel type of resist- and dose-modulated 3D electron beam lithography. The method is scalable and provides a generic approach for nanopatterning surfaces with functional polymers. Aspects of the nanoscale PANI growth mechanism are discussed and the highly controllable, sub-picogram scale fabrication is emphasized. Simple schemes for single PANI nanowire fabrication, processing and device integration are presented.
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