Hybrid silicon-ferroelectric oxide platform for tunable nanophotonics on silicon

Abstract

In this communication, we present strategies to implement novel or enhanced optoelectronic functionalities on silicon via the monolithic integration of functional oxides as active layers for nanophotonic devices. We focus on the use of ferroelectric oxides with naturally strong electro-optical coefficients such as BaTiO 3 (BTO) on SOI for the realization of electro-optical modulators around 1.55 µm. Specifically, we present methods to monolithically integrate monocrystalline BTO on silicon and to design devices that leverage their strong Pockels coefficient for efficient and fast electro-optical modulation. We show preliminary results on the fabrication, process and characterization of a slotted BTO waveguide platform. We further discuss on first electro-optical modulation results and how to improve the current optoelectronic platform. In particular, we will explain the potential origins of optical losses in such systems and how to avoid them.