Abstract
Reliability is critical in MEMS devices design and production. Probabilistic Physics of Failure is proposed in this research for evaluation of MEMS devices reliability. Failure mechanisms are evaluated for determining the most common failures. Accordingly, a deterministic model is selected for the analysis of the life and reliability for the dominant failure mechanisms. By identification of the uncertainty sources affecting dielectric lifetime, the deterministic model is converted to a probabilistic model. This model is simulated by utilization of the Monte Carlo method. The result of life estimation is then updated using the Bayesian method. As a case study, a framework is developed for reliability evaluation of the MEMS devices with capacitive RF MEMS switches. Results of FMEA show that stiction caused by dielectric charging, is the main failure mode in RF MEMS capacitive switches due to the presence of a high electric field across the dielectric and existence of point defects in these materials. Finally, the results of life estimation are updated using the Bayesian method.
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