Abstract
The paper reports on a cold-cathode Penning ionization gauge (PIG) discharge ignited and sustained by microwave electron cyclotron resonance argon plasma at pressures below 0.01 Pa. The discharge was created in a 20-cm-diam PIG anode with a length-to-diameter ratio of two. The experimental data show that the discharge exists in a high-current discharge mode with a considerable cathode fall and a weak anode fall. The measurements of the discharge current and plasma parameters as a function of the discharge parameters are reported. The mechanism of the discharge and its possible applications are discussed.
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