Hybrid Molecular Layer Deposition of Molybdenum-Aminates as Hydrogen Evolution Reaction Electrocatalysts

Abstract

The development of high-performance hydrogen evolution reaction (HER) electrocatalysts from noble metal-free materials is critical to achieving cost-effective water splitting and ultimately realizing affordable hydrogen based on renewable energy. Compounds based on earth-abundant transition metals have been the subject of great research interest for this purpose, with metal nitrides gaining recent attention due to their high conductivity and corrosion resistance. Molybdenum nitride-based electrocatalysts have shown particular promise, with many of the best reported activities occurring in composite systems wherein crystalline MoNx domains are embedded in an amorphous N-doped carbon matrix. The present work demonstrates the formation of such uniquely active morphologies in films deposited by organic-inorganic hybrid molecular layer deposition (MLD).Hybrid MLD is a hybridization of other well-established layer-by-layer deposition techniques – namely atomic layer deposition (used to deposit inorganic films) and purely organic MLD. This family of techniques involves the cyclical exposure of a growth surface to alternating vapor-phase chemical precursors which react in a self-limiting fashion to saturate available surface sites, offering atomic- and molecular-level control over the resulting films. This presentation will introduce the successful development of hybrid MLD deposition procedures for new Mo-aminate materials using Mo(CO)6 as a Mo precursor and various amine precursors, including ethylenediamine, p-phenylenediamine, and tris(2-aminoethyl)amine.We will describe how the molecular level of control offered by this technique enables tunable variations in film composition and structure, lending unique insights into how the local bonding environment of Mo active sites affects their catalytic properties towards HER. Increased nitrogen loading in the MLD films was shown to decrease the overpotentials required to drive HER in acidic media (0.5 M H2SO4) and improve film stability. Catalysts with N/Mo ratios above 2 demonstrated the best performance, with overpotentials lower than 400 mV at -10 mA/cm2. By incorporating organic components in the MLD films, it was possible to induce desirable morphological changes in the catalytic material – notably including the development of increased active site density – simply through initial exposure to HER testing conditions. The choice of organic precursor affected the rate and extent of these changes through structural effects like crosslinking and crystallinity, which led to more stable catalysts, slowed the rate of morphological changes, and impacted final film structure.