Abstract
Our group has developed a new free-surface microstereolithography apparatus with high laminate resolution and accuracy for hybrid microstereolithography. We applied a feedback control system to adjust the surface level of the UV curable resin constantly and precisely. Moreover, by modifying the design of the squeegee used to laminate the UV curable resin in the apparatus, we reduced the height of the meniscus just behind the squeegee. Through this modification, the laminateresolution of the apparatus was refined to 10μm. Using the apparatus thus developed, we successfully miniaturized a biochemical IC chip, a microfluidic device which has three-dimensional hybrid microstructure. Compared with earlier microstructures, this advanced apparatus for free-surface microstereolithography can fabricate much smaller microstructures with much smoother surfaces. Henceforth we expect that this achievement will be a key technology to innovate polymer MEMS (MicroElectroMechanical Systems), microfluidic devices and other fields.
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