Hybrid integration of microfabricated chemοcapacitor arrays with miniaturized read-out electronics towards low-power gas sensing module

Abstract

A hybrid gas sensing module consisting of an array of 8 polymer coated capacitive sensors and low power read-out electronics is introduced. The chemocapacitor array is fabricated with standard microelectronics/micromachining processes allowing for the realization of planar InterDigitated Electrodes (IDEs). The read-out electronics sub- module consists of an analog multiplexer for the sequential measurement of the sensor array elements, a capacitance to 24-bit converter and a USB to I2C interface. The compact hybrid module has been successfully applied in the detection of sub-100ppm concentrations of p-xylene and toluene. The responses to various humidity levels have been also evaluated.