Hybrid integration of color centers in nanodiamond with silicon nitride nanophotonics

Abstract

Integration of quantum emitters with nanophotonic circuits is crucial for realizing scalable and highly connected multi-qubit photonic chip for quantum information processing. Here, we report our recent experimental progress on hybrid integration of silicon-vacancy centers in nanodiamond with silicon nitride nanophotonics. Enabled by an advanced pick-and-place technique and stepped silicon nitride deposition, we demonstrated deterministic and non-evanescent coupling between silicon-vacancy centers in a preselected nanodiamond and silicon nitride nanophotonic devices. Our method can be applied to virtually any color centers in diamond and pave the way towards high-yield and scalable fabrication of large-scale quantum photonic circuits for the study of many-body quantum physics and photon-mediated entanglement generation.