Abstract
In recent years, optical manipulation has gained increasing interest, especially in combination with microfluidics. This combination offers promising tools for a fast and cost-effective sample analysis and manipulation. The contamination-free handling of micrometer-sized particles without any mechanical contact is an attractive tool for biology and medicine. VCSELs (vertical-cavity surface-emitting lasers) are an excellent choice for the trapping lasers, offering the opportunity of parallel particle manipulation by using two-dimensional VCSEL arrays, and of miniaturization by means of integration. In this paper, we present two novel concepts for the realization of the so-called integrated optical trap, resembling a strongly miniaturized version of the typically bulky setup of an optical trap. For this purpose, AlGaAs-GaAs-based VCSEL arrays with a very small device pitch were fabricated. We show the realization of integration-ready particle manipulation devices, both with top-emitting and with bottom-emitting densely packed VCSEL arrays. The smallest pitch of 18 μm is achieved with bottom-emitting VCSEL arrays, having mesa diameters of only 16 μm.
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