Abstract
The aim of this paper is to describe hybrid pulsed laser magnetron technology (PLDMS) for deposition of both TiC and TiCN thin films. Films were fabricated in argon atmosphere (TiC) and argon/nitrogen mixtured atmosphere (TiCN). Titanium carbide based materials exhibit an unique combination of physical properties such as high hardness, low friction coefficient, high thermal conductivity, and high thermal stability. TiCN thin films are used for improvement of adhesion of carbon based thin films as an interlayer prior to carbon based deposition Film properties were studied by SEM, XRD, XPS and GDOES. The PLDMS method allows easily and smoothly change composition profile along layer thickness by changing of laser repetition rate and magnetron power. The PLDMS system is a suitable tool for fabrication of specially tailored layer at new deposition conditions.
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