Abstract
Femtosecond (fs) lasers are well established in material processing. Both additive and subtractive processing can be realized with them. Modern amplified fs laser systems can be heavily tuned allowing to use single light source to realize all relevant processing regimes. In this work we exploit it in order to achieve hybrid additive-subtractive 3D micro- and nanomanufacturing. For fabrication we chose highly promising medical devices such as very precise flow meter cell membrane perforators based on microblades or spinning microneedles. We show that the capability of choosing processing regime and perform everything in one workstation simplifies design and fabrication process.
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