Abstract
Humidity sensors using various NASICON materials have been experimentally produced by the thick-film printing method. Among the NASICON materials, one which did not contain phosphorus shows a comparatively low resistance in low humidity. The relation between the logarithm of its resistance and relative humidity is almost linear and hysteresis free (2 MΩ-10 kΩ in the range 20–90% r.h.). Also the humidity sensor using NASICON material not containing phosphorus compared with one using usual NASICON containing phosphorus has improved long-term stability and durability in various environmental tests.
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