Humidity Sensor - A Review of Nanostructured Zinc Oxide (ZnO)-Based Humidity Sensor

Abstract

We have reviewed humidity sensors based on the Zinc oxide (ZnO) humidity sensor. There are only a few papers reviewing on the ZnO humidity sensor. The characteristics, structures, advantages, and fabrication methods of ZnO have been studied to understand the suitability of the ZnO to be applied at different kind of condition such as for extreme environment, low level humidity detection, and very high humidity level circumstances. The electrical and physical properties of ZnO humidity sensors such as sensitivity, response time, stability, uniformity, and crystallinity have also been discussed in this review. ZnO nanostructures have been widely used for humidity sensors because of its’ good stability, high sensitivity for humidity-sensing, low cost, and has a wide band gap. Sol-gel preparation method is commonly used to for ZnO humidity sensor fabrication since it can produce a film with high uniformity, simple process and low cost. Keywords: Humidity Sensor, Metal Oxide, Semiconducting Type, Ceramic Type, Humidity-Sensing, Band Gap, Sol-Gel Preparation Method.