How to determine the relative ion concentrations of multiple-ion-species plasmas generated in the multi-dipole filament source

Abstract

This paper introduces how to determine concentrations of ion species in a mixed gas plasma that are not linearly proportional to their neutral partial pressures. A particle balance model was developed to predict the relative ion concentrations in multiple-ion-species plasmas, considering their ionization rates and loss fluxes to the wall. Analysis is carried out especially with Ar/Xe and Ar/He multi-dipole plasmas in which the neutral gases are directly ionized by the mono-energetic primary electrons. The experimental data of ion concentrations were obtained using the ion acoustic wave measurement method of the concentration of two ion species. The comparison reveals that the ion concentration ratio is linearly proportional to the ratio of the ionization cross sections and the ion loss velocity between two gas species. Especially, the model prediction is improved with using the two-ion-species sheath model (recently reported by Baalrud and Hegna) for obtaining the ion loss velocity at the sheath boundary.