Abstract

Second-harmonic-generation (SHG) has long been considered as a powerful optical surface diagnostic tool due to its ability to sense optical surface properties in centrosymmetric material. In a series of papers Aspnes et. al. showed that azimuthal measurements of rotated samples can be described by the so called simplified bond-hyperpolarizabilty model (SBHM) [G. D. Powell, J. F. Wang, and D. E. Aspnes, Phys. Rev. B 65, 205320 (2002)]. In this work, their model is applied to show how small changes in the step hyperpolarizability and vicinal angle of a Silicon (001) interface affects the second harmonic generation (SHG) intensity profile significantly, suggesting that real time surface deposition and interface vicinal angle monitoring using SHG is possible.

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