Abstract

To keep up with the times, the semiconductor manufacturing industry needs to break down barriers to data transmission. Since the manufacturing process of semiconductor materials is expensive, the material suppliers need to obtain a large amount of measurement information to optimize it. Therefore, its data cooperation with semiconductor manufacturers is particularly important. This paper uses Athnia, a data sharing platform for semiconductor manufacturing, as an example to illustrate the positive impact of high-quality information on the industry. Based on a three-party evolutionary game model of Industrial Internet Platform, semiconductor manufacturer and material supplier, this paper analyzes the factors affecting the choice of tripartite information sharing strategies. The results confirm the important role played by the Industrial Internet Platform in information sharing and highlight how the platform should adjust its strategies in different situations. This paper also identifies a number of external factors that affect the overall quality of information sharing. These findings will facilitate data sharing in semiconductor manufacturing.

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