Abstract
Cleanrooms pose a special challenge for cleanliness testing. Contaminants in the form of particles, metals, ions, and organics must be completely removed to ensure defect-free processing. Ions such as chloride, sulfate, nitrate, and ammonia can degrade water surfaces, particularly in the presence of adsorbed water. A number of analytical methods are used to test for cleanliness and contamination control Ion chromatography is used to determine ionic contamination. The presentation will answer the following questions:• What is ion chromatography?• How is ion chromatography used to evaluate cleanliness?• What are the recent improvements that have been made to the technology?• What are some typical cleanliness testing applications?• How will the use of ion chromatography help my company?
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